Mini Valve Mitigates Contamination Risks in Critical Wafer Processing Equipment
July 10th, 2019
Choosing a fluid-handling valve used to be easy given each valve type was specific to its utility.
Diaphragm valves, for instance, are used primarily for handling slurries and corrosive fluids. Offering minimal surface contact, diaphragm valves are considered the cleanest valve and consequently have found widespread use in the semiconductor industry. Still, minimizing entrapment of dead volumes of fluid is an important consideration when evaluating diaphragm valve cleanliness performance given entrapment can be particularly severe and result in loss of process efficiency. efficiency. And because entrapment and fluid mixing and can lead to fluid degradation and contamination problems in dispensing, additional fluid movements through the valve are required to flush out degraded fluid and/or contaminants and result in the waste of expensive chemicals.
Engineers from two different companies representing semiconductor and life science markets reached out to Saint-Gobain to inquire about co-developing a manifold solution to help achieve minimal chemical entrapment requirements that seemed out of reach based on our valve (3/16’’) product offering.