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Metal Extraction Performance Report for Versilon™ HP PFA 400 UC Tubing
March 07th, 2018
Versilon HP PFA 400 UC tubes were tested in accordance with the SEMI C90 specification for Metallic Surface Contamination by an independent test lab. Saint-Gobain produced two tubes (3/8” OD x ¼” ID) using virgin HP PFA pellets that were sourced from the two main raw material providers that supply the Semiconductor industry. Both were manufactured in a clean room, on the same equipment and with the same settings.
Two tubes (3/8” OD x ¼” ID) were produced in our clean room on the same equipment with the same setting. Each of them was produced with Virgin HP PFA pellets containing less than 5 PPb of Iron (as required by the standard) and sourced from the two main raw material providers servicing the semiconductor industry. The prepared samples were leached with 5% HNO3 for 24 hours at ambient temperature in accordance with C90. A leach blank was also prepared in this manner for the testing. Values for each result were calculated by subtracting the blank and normalizing to the μg/m2 of the surface of the leaching area.