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Furon® HPVM Valves Normally Open - Reliability in 49% HF
July 24th, 2018
Furon HPVM valves, normally open (NO), were tested for reliability in 49 wt% hydrofluoric acid (HF) by an independent test lab using the protocol of a major US OEM manufacturer. Furon HPVM high purity valves are ideal for use in the semiconductor industry or other applications requiring high purity and/or superior chemical resistance.
Accelerated Life Test Method
Eight Furon HPVM valves NO were assembled in a manifold (valve set A in Figure 1) allowing two parallel flow paths through each set of 8 valves. Each set was cycled 3 seconds open and 3 seconds closed at room temperature with an actuator pressure of 80 psig. One set was opened as the other set was closed to maintain a constant flow of acid through the system at 76-80 psig. Flow was provided by a double diaphragm pump. Valves were inspected every workday for leaks.
The accelerated life test was performed on a set of eight valves in 49% HF. Cleanroom-grade HF was used. The acid was replaced halfway through the test to ensure that full chemical strength was maintained.
For test details and results, download the Statement of Performance >>