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Furon® and GEMÜ® Valves Compared in new Benchmark Report on Reliability in Slurry Applications
November 07th, 2019
Furon Q-Valve and GEMÜ CleanStar® valves were tested side by side to compare reliability in slurry applications for the semiconductor industry. Cabot Semi-Sperse™ slurries were used for the test, which was conducted by a third-party, independent lab.
Eight Furon valves and eight Gemu valves, normally closed, were assembled into four manifolds, four parallel valves (of the same model) each and installed into the slurry circulation system.
The two manifolds of each model group were plumbed to a common return line, where long tubes of a smaller diameter were used as restrictions to regulate flow. This approach drops pressure over an extended distance compared to throttle valves, reducing shear stress on the slurry.
The two manifolds of each model group were cycled open and closed 180° out of phase for 3 seconds for each state to a maintain constant system flow. Clean Dry Air (CDA) at 80 & 87 psi was used to actuate the Furon & Gemu valves respectively. Flow and pressure were supplied by a single Furon diaphragm pump, model A2SY3F16. Peak pump outlet pressure was kept at 30 psi during testing. Flow was initially set to achieve approximately 0.5 ft/sec through each open valve, however the flow dropped slightly during the test due to increased slurry viscosity. The system was kept at approximately room temperature for the duration of the test. A detailed schematic of the test system can be found in Figure 1.