Semiconductor Fluid Control Solutions

Chemcial distribution systems | Microelectronic Applications | Saint-Gobain Process Systems

Chemical Distribution Systems & Wafer Processing Equipment

At Saint-Gobain, we understand the intricacies of the fluid control applications in the semiconductor industry and provide the best support to microelectronics OEMs by designing or co-developing components or subsystems that will enable them to build the most reliable chemical distribution system or wafer processing equipment and achieve optimum yield for their unique application.

Saint-Gobain has many years of experience offering long-term solutions that feature comprehensive design capabilities and material science know how and that deliver peace of mind.

Not so many years ago, chips were mostly manufactured for use in very specific and narrow application generally related to computers. Today, the breadth of chip applications is so wide that they are present in almost any device you use on a daily basis. This move has been enabled through dye shrinking and optimizing yield performance on any given process ensuring the safest work environment for the manufacturing team. But because dye shrinking involves smaller print, every element, even the smallest ones become critical, and so Saint-Gobain must deal with more severe requirements in material cleanliness and purity.

Using the SEMI standard as a requirement for the cleanliness and purity of our components, Saint-Gobain works closely with industry experts to adjust our threshold to their unique requirements, using our expertise on material science and processing, environment of production and traceability in our entire supply chain.

We understand, optimizing yield performance requires an intimacy with our customer's processes in order to match their requirements with our existing Furon components or develop a unique custom solution as well as varied expertise pending on the application. For example:

When working on a hook up in a facility, expertise in fluid mechanics is needed to ensure proper flow and pressure.
On the sub fab chemical distribution system (CDS; CCSS; SDS; BCDS) expertise in fluid mechanics, chemical compatibility (instant and over the time), mechanical and pneumatic compatibility (for the pump) is needed.
In processes closer to the wafer, the focus is on how reliable and how durable the component is, and also how this is impacting the product carried.
For Chemical Mechanical Polishing (CMP) valve actuation and it impact on the integrity of the slurry is important as this will allow the system to have a more stable removal rate across a longer period of time.
For the etching process, the precision of chemical dosing over time is critical to ensure that the chemistry used on the wafer will have the right composition and as a result the right action.
For cleaning, focusing on dispensing the exact quantity of liquid on the wafer is necessary to remove every targeted chemistry.