Furon UPRM Pressure Regulator - Pneumatic
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Furon® UPRM Pressure Regulator - Pneumatic

High Purity Pressure Regulator

Furon UPRM Pneumatic Pressure Regulators from Saint-Gobain are engineered to accurately maintain predetermined output pressures in fluid lines utilizing a pneumatic actuator. Constructed from 100% high-purity PFA and PTFE wetted parts, these pressure regulators are ideal for ultra-pure, harsh or aggressive chemicals commonly used in semiconductor manufacturing. A modified PTFE isolation diaphragm protects the actuator components from the process media, eliminating the possibility of contamination from metal elements.

Specifications

Item # End Connection size in (mm) End Connection Type Orifice in (mm) Liquid Type Flow Factor Cv Pressure Regulation Range Psig (Bar) CAD
UPRM-144-P 1/4 (6.35)
  • FNPT
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1) Download CAD
UPRM-188-P 1/2 (12.7)
  • FNPT
 1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 3.2 10 - 60 (0.7 - 4.1) Download CAD
UPRM-744-P 1/4 (6.35)
  • FuseBond™
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1) Download CAD
UPRM-788-P 1/2 (12.7)
  • FuseBond™
 1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 3.2 10 - 60 (0.7 - 4.1) Download CAD
UPRM-F44-P 1/4 (6.35)
  • FlareGrip® II
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1) Download CAD
UPRM-F46-P 3/8 (9.525)
  • FlareGrip® II
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1) Download CAD
UPRM-F48-P 1/2 (12.7)
  • FlareGrip® II
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1) Download CAD
UPRM-F812-P 3/4 (19.05)
  • FlareGrip® II
 1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1) Download CAD
UPRM-F88-P 1/2 (12.7)
  • FlareGrip® II
 1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 3.2 10 - 60 (0.7 - 4.1) Download CAD
UPRM-S30044-P 1/4 (6.35)
  • Nippon Pillar Super 300®
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1)
UPRM-S30046-P 3/8 (9.525)
  • Nippon Pillar Super 300®
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1)
UPRM-S30048-P 1/2 (12.7)
  • Nippon Pillar Super 300®
 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1)
UPRM-S300812-P 3/4 (19.05)
  • Nippon Pillar Super 300®
 1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 10 - 60 (0.7 - 4.1)
UPRM-S30088-P 1/2 (12.7)
  • Nippon Pillar Super 300®
 1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
 3.2 10 - 60 (0.7 - 4.1)

Technical

Max. Liquid Temperature °F (°C) 194 (90)
Max. Inlet Liquid Pressure Psig (Bar) 90 (6.2)
Flow Path 2 Way

Applications

Applications
  • Chemical Distribution Systems
  • Wafer Processing Solutions

Features & Benefits

  • Handles fluid temperatures up to 194°F (90°C)
  • All fluoropolymer wetted surfaces
  • Non-metallic external surfaces
  • Integral leak port detection
  • Panel mount feature standard

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