23 octobre 2019
Furon Q-Valve and GEMÜ CleanStar® valves were tested side by side to compare impact on slurry in semiconductor applications. Cabot Semi-Sperse™ slurries were used for the test. The analysis was conducted by SGR Shanghai, one of eight Saint-Gobain research and development centers.
Eight Furon valve and eight GEMÜ valves, normally closed,were assembled as represented in Figure 1. The valves were arranged in a series in order to maximize their impact on the slurry (8 times the impact) over other components present in the configuration. The cycling was set to enable the slurry to move freely through all the valves between two actuations with a valve open/close time of 10 seconds. A derivation was generated after the pump and before the series of valves to enable proper, continuous operation when the valves were closed.
For results and additional test details, download the Benchmark Report >>