Micro-e Valve Boxes and Hook up Solutions
High Purity Valves, Manifolds & Fluoropolymer Tubing
A valve box is a combination of high purity valves generally located at the fab level, after a chemical distribution system, to split the main stream of a chemical toward the specific location in the fab. It is generally composed of a combination of pneumatic valves which is controlled through an automat from a remote place for the day to day operation and manual valves that can be actuated by an operator when specific operation (especially maintenance) takes place. Today, many of our customers are moving toward manifold concept vs discret valve to save space and reduce potential leek points. The pneumatic valve state is generally confirmed by a position indicator system which relays the information to the same automate actuating the valve.
Hook up is one of the many names for the fluoropolymer tubes that run in the facility / basement of a fab to connect the chemical distribution system, day tank, and storage tank. Due to the critical nature of the chemical generally used in the semiconductor industry (Fluorhydric acid (HF); Chlorydric acid (HCl); Sulfuric acid (H2SO4); Phosphoric Acid(H3PO4); TMAH; Oxygen peroxide (H202)), fluoropolymer tube or pipes are critical to ensure the safety and the integrity of the fluid transported. For improved safety we may count on dual containment tubing which provides an additional layer of protection.
Read our article "Using Manifold Technology in Fluid Systems for Microelectronics Manufacturing" to learn how this technology helps optimize safety, cleanliness and cost of ownership >>
- Premium flow performance up to 7 bars
- Compact distribution design
- Unmatched tube & hose offer
- HP PFA tubing matching the best industry standard
- Safety (Coax tubing)
- Robustness (Hoses)