Micro-e Chemical Distribution Systems
High Purity Chemical Pumps, Valves & Dampeners
Chemical Distribution Systems are known generally by the following abbreviations: CCSS, CDS or SDS and refer to the product carried and the amount of flow. This specific installation is considered the heart of a microelectronics facility as it energizes the chemical that is transported from main storage to either daily storage or directly up to a tool in a clean room. Due to their function, high purity chemical pumps, high purity dampeners, high purity valves or any components installed in a Chemical Distribution System are critical to maintaining a wafer processing system, keeping it up and running and providing the necessary chemistry that will be processed on the wafer.
Experience Saint-Gobain's Chemical Distribution System solutions through our two interactive infographics. From Furon® high purity pumps, dampeners and valves to Versilon™ high purity tubing, Saint-Gobain products play a critical role in a Chemical Distribution System.
- Build to last & easy to choose
- Metal Free
- O-ring free
- Accessories enabling premium flow control
- Full range of component from the tube up to the pump